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Facilities

We are part of the Quantum Materials Institute at UBC, and we have both in-house 30 kV ebeam lithography and cleanroom nanofabrication facilities on-site. We also use the JEOL JBX-6300FS Electron Beam Lithography System at the University of Washington to fabricate silicon-on-insulator photonic circuits. The main optics labs contain a host of spectroscopy tools, mostly devoted to infrared wavelengths. We have access to a number of electrodynamic design and layout tools including Lumerical Solutions FDTD software, COMSOL, Mentor Graphics etc., some of which is provided with support from the Canadian Microelectronics Corporation (CMC).