Silicon nanostencils with integrated support structures

TitleSilicon nanostencils with integrated support structures
Publication TypeJournal Article
Year of Publication2010
AuthorsFostner, Shawn, Sarah a. Burke, Jessica Topple, Jeffrey M. Mativetsky, Jean Beerens, and Peter Grutter
JournalMicroelectronic Engineering
Volume87
Pagination652–657
ISSN01679317
URLhttp://linkinghub.elsevier.com/retrieve/pii/S0167931709005711
DOI10.1016/j.mee.2009.09.004
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