Method and device for accurately measuring the incident flux of ambient particles in a high or ultra-high vacuum environment

TitleMethod and device for accurately measuring the incident flux of ambient particles in a high or ultra-high vacuum environment
Publication TypeMiscellaneous
Year of Publication2011
AuthorsBooth, J. L., D. E. Fagnan, B. G. Klappauf, Kirk W. Madison, and J. Wang
URLhttp://www.google.com/patents/US20110290991
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