Low Noise EUV Generation via a Femtosecond Enhancement Cavity

TitleLow Noise EUV Generation via a Femtosecond Enhancement Cavity
Publication TypeBook
Year of Publication2010
AuthorsMills, Arthur K., T. J. Hammond, Rob Stead, and David J. Jones
PublisherIeee
CityNew York
ISBN Number978-1-55752-890-2
Keywordscoherent
AbstractUsing a femtosecond enhancement cavity in combination with high harmonic generation, we generate EUV radiation out to 61 nm at high (50 MHz) repetition rates with extremely low amplitude noise. (C) 2009 Optical Society of America
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