Chemical imaging of photoresists with coherent anti-Stokes Raman scattering (CARS) microscopy RID C-3312-2011

TitleChemical imaging of photoresists with coherent anti-Stokes Raman scattering (CARS) microscopy RID C-3312-2011
Publication TypeJournal Article
Year of Publication2004
AuthorsPotma, EO, XS Xie, L. Muntean, J. Preusser, D. Jones, J. Ye, SR Leone, WD Hinsberg, and W. Schade
JournalJournal of Physical Chemistry B
Volume108
Issue4
Pagination1296 - 1301
Date Published2004/01/29/
ISBN Number1520-6106
Keywords0.13 mu-m, challenges, Diffusion, electron-beam lithography, field infrared microscopy, picosecond lasers
AbstractCoherent anti-Stokes Raman scattering (CARS) microscopy is demonstrated to be a powerful imaging technique with chemical specificity for studying chemically amplified polymer photoresists. Samples of poly(tertbutyl oxycarbonyloxy styrene) (PTBOCST) resist imprinted by interferometric lithography with a pattern of lines/spaces of 400 nm/400 nm and 200 nm/200 nm were used to test CARS imaging capabilities. Chemical contrast in the image is obtained by probing the carbonyl stretching vibration of the tert-butoxyl carbonyl group of PTBOCST. The experimental images demonstrate high spatial resolution (approximate to270 nm) and strong signal, which allows short acquisition times. Advantages and limitations of CARS in comparison with other imaging techniques with chemical specificity, such as infrared near field scanning optical microscopy (IR NSOM), are discussed.
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